I was just reading this article about 7nm and EUV. Thought it might be of interest to the more nerdy of you 
https://www.pcgamesn.com/intel-amd-7nm-cpu-euv
Initial costs could be high but the use of 13.5nm light rather than 193nm could have a lot of benefits. I didn't realise that light below a wavelength of 193nm is absorbed by the air.

https://www.pcgamesn.com/intel-amd-7nm-cpu-euv
Initial costs could be high but the use of 13.5nm light rather than 193nm could have a lot of benefits. I didn't realise that light below a wavelength of 193nm is absorbed by the air.