Can't uninstall Silverlight

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I tried to update to the new Silverlight 6, but the installation fails. I wanted to uninstall any previous versions, but they're not listed in Add/Remove Programs. Revo Uninstaller can't find it. All versions are stacked in my Program Files, with no uninstaller.

How do I get rid of it?
 
I dowloaded and ran it as Admin. It gives me an error:

Error 1309: Error reading from file E:\Program Files (x86)\MSECACHE\WICU3\Unicode\MsiZap.exe. Verify the file exists and that you can access it.

Edit: I read that I change MsiZapU.exe to MsiZap.exe. Did that and accessed msicuu.exe. MS Silverlight is not on the list.

What now? Do I delete it manually?
 
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