I hope it's backwards compatibility* holding them back in the teens and not something that will be repeated ad nauseum at 10nm+.
*16nm uses the same metal layers as 20nm so customers could port designs easily. Although hardly anyone used 20nm so eh.
It's got nothing to do with backwards compatibility, 16 and 14nm finfets(from tsmc and samsung/glofo respectively) ARE 20nm processes. They are being called something less for no reason other than the electronic advantage from finfets is somewhat worth calling it a different node AND because Intel has been consistently lying(to a greater degree) about their node size for so long they'd look poor in comparison.
There is no backwards compatibility issue at all, it's 20nm with finfets, nothing more or less.
The trouble is finfets and Intel's 14nm finfets are faring no better really. There is a reason Broadwell has been MASSIVELY delayed, has had it's promised advantages scaled back from early days with promises of 20% better performance to now 4%, and that is largely BS. AFAIK their 22nm mobile chips can run at 2-2.5Ghz with as low as 0.8v or something, the similar 14nm chips are now pushing 1.05v or something for 1.6-2Ghz range. Everyone is struggling very badly getting the voltages and yields on smaller finfets.
Intel's 22nm had a 84nm metal pitch which is what GloFo was achieving on 28nm, I think TSMC were around 90nm on their 28nm.
While Intel is doing something closer to a real 14nm, it's metal pitch is still 64nm, which is the same TSMC/GloFo/Samsung are achieving on their 20nm. It's somewhat the limit with current equipment, dual patterning and current wavelength of light being used.
10nm is likely to face a lot of new problems. Intel is on I think they say 3rd gen finfets but struggling badly. Everyone else is struggling even worse on 1st gen finfets, the common thing being size. It's quite likely that FD-SOI at 20-14nm FD-SOI might be the go to higher power using process nodes.
However the "rumour" is utterly bogus, won't install equipment till Q3, nonsense. Firstly most of the equipment is the same as the 20nm process because it is 20nm. there are basically 10-15% extra machines, not for any real difference just because different machines make some of the stages of making the finfets. This equipment would need to be in place like a year before mass production, they've already stated they've been in risk production and run test chips and the like meaning the equipment(much of it) has to be there already. There are of course stages of upgrading. YOu might upgrade one of say 4 or 6 lines in a fab at a time so 80% of capacity continues producing while only 20% is offline. YOu play around with that, learn a lot then bring another line down at a time to upgrade, etc, etc. So SOME equipment may have been delayed.